# High-resolution and large-area nanoparticle arrays using EUV interference lithography

> Research article (Nanoscale, 2015) · cited 66× · AI/ML

**Wikidata**: [openalex:W2146563230](https://www.wikidata.org/wiki/openalex:W2146563230)  
**Source**: https://4ort.xyz/entity/high-resolution-and-large-area-nanoparticle-arrays-using-euv-interference-lithography