# High resolution 3D X-ray microscopy for streamlined failure analysis workflow

> Research article (2016 IEEE 23rd International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA), 2016) · cited 13× · AI/ML

**Wikidata**: [openalex:W2520732322](https://www.wikidata.org/wiki/openalex:W2520732322)  
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