# High-Q 3D Micro-Shell Resonator with High Shock Immunity and Low Frequency Mismatch for MEMS Gyroscopes

> Research article (2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS), 2019) · cited 26× · AI/ML

**Wikidata**: [openalex:W2980507954](https://www.wikidata.org/wiki/openalex:W2980507954)  
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