# High-Precision XY Stage Motion Control of Industrial Microscope

> Research article (IEEE Transactions on Industrial Electronics, 2018) · cited 20× · AI/ML

**Wikidata**: [openalex:W2805382414](https://www.wikidata.org/wiki/openalex:W2805382414)  
**Source**: https://4ort.xyz/entity/high-precision-xy-stage-motion-control-of-industrial-microscope