# High precision and stability temperature control system for the immersion liquid in immersion lithography

> Research article (Flow Measurement and Instrumentation, 2016) · cited 23× · AI/ML

**Wikidata**: [openalex:W2509340785](https://www.wikidata.org/wiki/openalex:W2509340785)  
**Source**: https://4ort.xyz/entity/high-precision-and-stability-temperature-control-system-for-the-immersion-liquid-in-immersion-lithography