# High performance MEMS tactile sensor array with robustness and fabrication simplicity

> Research article (2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS), 2016) · cited 12× · AI/ML

**Wikidata**: [openalex:W2290905307](https://www.wikidata.org/wiki/openalex:W2290905307)  
**Source**: https://4ort.xyz/entity/high-performance-mems-tactile-sensor-array-with-robustness-and-fabrication-simplicity