# High-NA EUV lithography exposure tool: program progress

> Research article (Extreme Ultraviolet (EUV) Lithography XI, 2020) · cited 59× · AI/ML

**Wikidata**: [openalex:W3014014393](https://www.wikidata.org/wiki/openalex:W3014014393)  
**Source**: https://4ort.xyz/entity/high-na-euv-lithography-exposure-tool-program-progress