# High depth-resolution laser ablation chemical analysis of additive-assisted Cu electroplating for microchip architectures

> Research article (Journal of Analytical Atomic Spectrometry, 2015) · cited 24× · AI/ML

**Wikidata**: [openalex:W1889380538](https://www.wikidata.org/wiki/openalex:W1889380538)  
**Source**: https://4ort.xyz/entity/high-depth-resolution-laser-ablation-chemical-analysis-of-additive-assisted-cu-electroplating-for-microchip-architecture
