# High-aperture EUV microscope using multilayer mirrors and a 3D reconstruction algorithm based on z-tomography

> Research article (Optics Express, 2022) · cited 10× · AI/ML

**Wikidata**: [openalex:W4310045623](https://www.wikidata.org/wiki/openalex:W4310045623)  
**Source**: https://4ort.xyz/entity/high-aperture-euv-microscope-using-multilayer-mirrors-and-a-3d-reconstruction-algorithm-based-on-z-tomography