# Hidden Markov model-based predictive maintenance in semiconductor manufacturing: A genetic algorithm approach

> Research article (2017 13th IEEE Conference on Automation Science and Engineering (CASE), 2017) · cited 14× · AI/ML

**Wikidata**: [openalex:W2784184836](https://www.wikidata.org/wiki/openalex:W2784184836)  
**Source**: https://4ort.xyz/entity/hidden-markov-model-based-predictive-maintenance-in-semiconductor-manufacturing-a-genetic-algorithm-approach