# Growth of ZnO:Al by atomic layer deposition: Deconvoluting the contribution of hydrogen interstitials and crystallographic texture on the conductivity

> Research article (Thin Solid Films, 2019) · cited 10× · AI/ML

**Wikidata**: [openalex:W2971593301](https://www.wikidata.org/wiki/openalex:W2971593301)  
**Source**: https://4ort.xyz/entity/growth-of-zno-al-by-atomic-layer-deposition-deconvoluting-the-contribution-of-hydrogen-interstitials-and-crystallographi
