# Growth of two-dimensional WS2 thin films by reactive sputtering

> Research article (Vacuum, 2021) · cited 32× · AI/ML

**Wikidata**: [openalex:W3136192161](https://www.wikidata.org/wiki/openalex:W3136192161)  
**Source**: https://4ort.xyz/entity/growth-of-two-dimensional-ws2-thin-films-by-reactive-sputtering