# Growth and Characterization of Polyimide-Supported AlN Films for Flexible Surface Acoustic Wave Devices

> Research article (Journal of Electronic Materials, 2016) · cited 11× · AI/ML

**Wikidata**: [openalex:W2291529928](https://www.wikidata.org/wiki/openalex:W2291529928)  
**Source**: https://4ort.xyz/entity/growth-and-characterization-of-polyimide-supported-aln-films-for-flexible-surface-acoustic-wave-devices