# Glancing Angle Deposition and Growth Mechanism of Inclined AlN Nanostructures Using Reactive Magnetron Sputtering

> Research article (Coatings, 2020) · cited 40× · AI/ML

**Wikidata**: [openalex:W3048170676](https://www.wikidata.org/wiki/openalex:W3048170676)  
**Source**: https://4ort.xyz/entity/glancing-angle-deposition-and-growth-mechanism-of-inclined-aln-nanostructures-using-reactive-magnetron-sputtering