# Genetic algorithm-based optical proximity correction for DMD maskless lithography

> Research article (Optics Express, 2023) · cited 28× · AI/ML

**Wikidata**: [openalex:W4381683756](https://www.wikidata.org/wiki/openalex:W4381683756)  
**Source**: https://4ort.xyz/entity/genetic-algorithm-based-optical-proximity-correction-for-dmd-maskless-lithography