# Generic characterization method for nano‐gratings using deep‐neural‐network‐assisted ellipsometry

> Research article (Nanophotonics, 2024) · cited 12× · AI/ML

**Wikidata**: [openalex:W4390915768](https://www.wikidata.org/wiki/openalex:W4390915768)  
**Source**: https://4ort.xyz/entity/generic-characterization-method-for-nanogratings-using-deepneuralnetworkassisted-ellipsometry