# Generative Adversarial Network-Based Fault Detection in Semiconductor Equipment with Class-Imbalanced Data

> Research article (Sensors, 2023) · cited 22× · AI/ML

**Wikidata**: [openalex:W4319599798](https://www.wikidata.org/wiki/openalex:W4319599798)  
**Source**: https://4ort.xyz/entity/generative-adversarial-network-based-fault-detection-in-semiconductor-equipment-with-class-imbalanced-data