# Generalized Predictive Control of Temperature on an Atomic Layer Deposition Reactor

> Research article (IEEE Transactions on Control Systems Technology, 2015) · cited 25× · AI/ML

**Wikidata**: [openalex:W2052301936](https://www.wikidata.org/wiki/openalex:W2052301936)  
**Source**: https://4ort.xyz/entity/generalized-predictive-control-of-temperature-on-an-atomic-layer-deposition-reactor