# Ge<sub>2</sub>Sb<sub>2</sub>Te<sub>5</sub> Thin Film as a Promising Heat‐Mode Resist for High‐Resolution Direct Laser Writing Lithography

> Research article (physica status solidi (RRL) - Rapid Research Letters, 2023) · cited 12× · AI/ML

**Wikidata**: [openalex:W4385605666](https://www.wikidata.org/wiki/openalex:W4385605666)  
**Source**: https://4ort.xyz/entity/ge-sub-2-sub-sb-sub-2-sub-te-sub-5-sub-thin-film-as-a-promising-heatmode-resist-for-highresolution-direct-laser-writing-