# GAN-OPC: Mask Optimization With Lithography-Guided Generative Adversarial Nets

> Research article (IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems, 2019) · cited 91× · AI/ML

**Wikidata**: [openalex:W2971516606](https://www.wikidata.org/wiki/openalex:W2971516606)  
**Source**: https://4ort.xyz/entity/gan-opc-mask-optimization-with-lithography-guided-generative-adversarial-nets