# Fundamental understanding and experimental verification of bright versus dark field imaging

> Research article (Extreme Ultraviolet Lithography 2020, 2020) · cited 14× · AI/ML

**Wikidata**: [openalex:W3089313944](https://www.wikidata.org/wiki/openalex:W3089313944)  
**Source**: https://4ort.xyz/entity/fundamental-understanding-and-experimental-verification-of-bright-versus-dark-field-imaging