# Fundamental aspects of resolution and precision in vertical scanning white-light interferometry

> Research article (Surface Topography Metrology and Properties, 2016) · cited 97× · AI/ML

**Wikidata**: [openalex:W2321032955](https://www.wikidata.org/wiki/openalex:W2321032955)  
**Source**: https://4ort.xyz/entity/fundamental-aspects-of-resolution-and-precision-in-vertical-scanning-white-light-interferometry