# Frequency-informed deep-learning denoising method supporting sub-nm metrology for high NA EUV lithography

> Research article (DTCO and Computational Patterning II, 2023) · cited 10× · AI/ML

**Wikidata**: [openalex:W4367307847](https://www.wikidata.org/wiki/openalex:W4367307847)  
**Source**: https://4ort.xyz/entity/frequency-informed-deep-learning-denoising-method-supporting-sub-nm-metrology-for-high-na-euv-lithography