# Frequency-Domain Data-Driven Adaptive Iterative Learning Control Approach: With Application to Wafer Stage

> Research article (IEEE Transactions on Industrial Electronics, 2020) · cited 27× · AI/ML

**Wikidata**: [openalex:W3178607925](https://www.wikidata.org/wiki/openalex:W3178607925)  
**Source**: https://4ort.xyz/entity/frequency-domain-data-driven-adaptive-iterative-learning-control-approach-with-application-to-wafer-stage