# Frequency and displacement analysis of electrostatic cantilever-based MEMS sensor

> Research article (Analog Integrated Circuits and Signal Processing, 2016) · cited 17× · AI/ML

**Wikidata**: [openalex:W2301797350](https://www.wikidata.org/wiki/openalex:W2301797350)  
**Source**: https://4ort.xyz/entity/frequency-and-displacement-analysis-of-electrostatic-cantilever-based-mems-sensor