# Formation of AlF<sub><i>x</i></sub> Gaseous Phases during High Temperature Etching: A Reactive Force Field Based Molecular Dynamics Study

> Research article (The Journal of Physical Chemistry C, 2019) · cited 10× · AI/ML

**Wikidata**: [openalex:W2949669639](https://www.wikidata.org/wiki/openalex:W2949669639)  
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