# Fluorine Gas Coinjection as a Solution for Enhancing Spatial Resolution of Time-of-Flight Secondary Ion Mass Spectrometry and Separating Mass Interference

> Research article (Analytical Chemistry, 2019) · cited 21× · AI/ML

**Wikidata**: [openalex:W2994945300](https://www.wikidata.org/wiki/openalex:W2994945300)  
**Source**: https://4ort.xyz/entity/fluorine-gas-coinjection-as-a-solution-for-enhancing-spatial-resolution-of-time-of-flight-secondary-ion-mass-spectrometr
