# Film thickness effect on texture and residual stress sign transition in sputtered TiN thin films

> Research article (Ceramics International, 2017) · cited 113× · AI/ML

**Wikidata**: [openalex:W2624445380](https://www.wikidata.org/wiki/openalex:W2624445380)  
**Source**: https://4ort.xyz/entity/film-thickness-effect-on-texture-and-residual-stress-sign-transition-in-sputtered-tin-thin-films