# Feedback control of thin film PZT MEMS actuator with integrated buried piezoresistors

> Research article (Sensors and Actuators A Physical, 2021) · cited 17× · AI/ML

**Wikidata**: [openalex:W3203278706](https://www.wikidata.org/wiki/openalex:W3203278706)  
**Source**: https://4ort.xyz/entity/feedback-control-of-thin-film-pzt-mems-actuator-with-integrated-buried-piezoresistors