# Feedback Control of Cluster Tools for Regulating Wafer Delays

> Research article (IEEE Transactions on Automation Science and Engineering, 2015) · cited 59× · AI/ML

**Wikidata**: [openalex:W2331742122](https://www.wikidata.org/wiki/openalex:W2331742122)  
**Source**: https://4ort.xyz/entity/feedback-control-of-cluster-tools-for-regulating-wafer-delays