# Fault Detection Prediction Using a Deep Belief Network-Based Multi-Classifier in the Semiconductor Manufacturing Process

> Research article (International Journal of Software Engineering and Knowledge Engineering, 2019) · cited 14× · AI/ML

**Wikidata**: [openalex:W2974418344](https://www.wikidata.org/wiki/openalex:W2974418344)  
**Source**: https://4ort.xyz/entity/fault-detection-prediction-using-a-deep-belief-network-based-multi-classifier-in-the-semiconductor-manufacturing-process