# Fast Pixelated Lithographic Source and Mask Joint Optimization Based on Compressive Sensing

> Research article (IEEE Transactions on Computational Imaging, 2020) · cited 12× · AI/ML

**Wikidata**: [openalex:W3033733028](https://www.wikidata.org/wiki/openalex:W3033733028)  
**Source**: https://4ort.xyz/entity/fast-pixelated-lithographic-source-and-mask-joint-optimization-based-on-compressive-sensing