# Fast lithographic source optimization method of certain contour sampling-Bayesian compressive sensing for high fidelity patterning

> Research article (Optics Express, 2019) · cited 14× · AI/ML

**Wikidata**: [openalex:W2981549026](https://www.wikidata.org/wiki/openalex:W2981549026)  
**Source**: https://4ort.xyz/entity/fast-lithographic-source-optimization-method-of-certain-contour-sampling-bayesian-compressive-sensing-for-high-fidelity-