# Fast EUV lithography simulation using convolutional neural network

> Research article (Journal of Micro/Nanopatterning Materials and Metrology, 2021) · cited 17× · AI/ML

**Wikidata**: [openalex:W3204784258](https://www.wikidata.org/wiki/openalex:W3204784258)  
**Source**: https://4ort.xyz/entity/fast-euv-lithography-simulation-using-convolutional-neural-network