# Fast diffraction model of an EUV mask based on asymmetric patch data fitting

> Research article (Applied Optics, 2023) · cited 10× · AI/ML

**Wikidata**: [openalex:W4385450581](https://www.wikidata.org/wiki/openalex:W4385450581)  
**Source**: https://4ort.xyz/entity/fast-diffraction-model-of-an-euv-mask-based-on-asymmetric-patch-data-fitting