# Fast and accurate proximity effect correction algorithm based on pattern edge shape adjustment for electron beam lithography

> Research article (Microelectronics Journal, 2023) · cited 16× · AI/ML

**Wikidata**: [openalex:W4319444781](https://www.wikidata.org/wiki/openalex:W4319444781)  
**Source**: https://4ort.xyz/entity/fast-and-accurate-proximity-effect-correction-algorithm-based-on-pattern-edge-shape-adjustment-for-electron-beam-lithogr