# Fast and accurate prediction of spurious modes in aluminum nitride MEMS resonators using artificial neural network algorithm

> Research article (2017 IEEE International Ultrasonics Symposium (IUS), 2017) · cited 10× · AI/ML

**Wikidata**: [openalex:W4253874964](https://www.wikidata.org/wiki/openalex:W4253874964)  
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