# Fast aerial image model for EUV lithography using the adjoint fully convolutional network

> Research article (Optics Express, 2022) · cited 12× · AI/ML

**Wikidata**: [openalex:W4221028262](https://www.wikidata.org/wiki/openalex:W4221028262)  
**Source**: https://4ort.xyz/entity/fast-aerial-image-model-for-euv-lithography-using-the-adjoint-fully-convolutional-network