# Fabrication of sharp silicon hollow microneedles by deep-reactive ion etching towards minimally invasive diagnostics

> Research article (Microsystems & Nanoengineering, 2019) · cited 207× · AI/ML

**Wikidata**: [openalex:W2969303812](https://www.wikidata.org/wiki/openalex:W2969303812)  
**Source**: https://4ort.xyz/entity/fabrication-of-sharp-silicon-hollow-microneedles-by-deep-reactive-ion-etching-towards-minimally-invasive-diagnostics