# Fabrication of Hexagonal Microlens Arrays on Single-Crystal Silicon Using the Tool-Servo Driven Segment Turning Method

> Research article (Micromachines, 2017) · cited 52× · AI/ML

**Wikidata**: [openalex:W2766894780](https://www.wikidata.org/wiki/openalex:W2766894780)  
**Source**: https://4ort.xyz/entity/fabrication-of-hexagonal-microlens-arrays-on-single-crystal-silicon-using-the-tool-servo-driven-segment-turning-method