# Fabrication of a MEMS Micromirror Based on Bulk Silicon Micromachining Combined With Grayscale Lithography

> Research article (Journal of Microelectromechanical Systems, 2020) · cited 28× · AI/ML

**Wikidata**: [openalex:W3041833826](https://www.wikidata.org/wiki/openalex:W3041833826)  
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