# Fabrication and comparative study of DC and low frequency noise characterization of GaN/AlGaN based MOS-HEMT and HEMT

> Research article (Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena, 2017) · cited 27× · AI/ML

**Wikidata**: [openalex:W2750103269](https://www.wikidata.org/wiki/openalex:W2750103269)  
**Source**: https://4ort.xyz/entity/fabrication-and-comparative-study-of-dc-and-low-frequency-noise-characterization-of-gan-algan-based-mos-hemt-and-hemt