# Extreme ultraviolet multilayer defect analysis and geometry reconstruction

> Research article (Journal of Micro/Nanolithography MEMS and MOEMS, 2016) · cited 12× · AI/ML

**Wikidata**: [openalex:W2290312554](https://www.wikidata.org/wiki/openalex:W2290312554)  
**Source**: https://4ort.xyz/entity/extreme-ultraviolet-multilayer-defect-analysis-and-geometry-reconstruction