# extreme ultraviolet lithography

> a next-generation lithography technology using an extreme ultraviolet (EUV) wavelength, currently expected to be 13.5 nm.

**Wikidata**: [Q371965](https://www.wikidata.org/wiki/Q371965)  
**Wikipedia**: [English](https://en.wikipedia.org/wiki/Extreme_ultraviolet_lithography)  
**Source**: https://4ort.xyz/entity/extreme-ultraviolet-lithography


## References

1. Freebase Data Dumps. 2013
2. [OpenAlex](https://docs.openalex.org/download-snapshot/snapshot-data-format)