# Extracting calibrated parameters from imaging ellipsometric measurement

> Research article (Japanese Journal of Applied Physics, 2017) · cited 13× · AI/ML

**Wikidata**: [openalex:W2763142253](https://www.wikidata.org/wiki/openalex:W2763142253)  
**Source**: https://4ort.xyz/entity/extracting-calibrated-parameters-from-imaging-ellipsometric-measurement
