# Exploring proximity effects and large depth of field in helium ion beam lithography: large-area dense patterns and tilted surface exposure

> Research article (Nanotechnology, 2018) · cited 19× · AI/ML

**Wikidata**: [openalex:W2803024587](https://www.wikidata.org/wiki/openalex:W2803024587)  
**Source**: https://4ort.xyz/entity/exploring-proximity-effects-and-large-depth-of-field-in-helium-ion-beam-lithography-large-area-dense-patterns-and-tilted