# Explainable prediction of deposited film thickness in IC fabrication with CatBoost and SHapley Additive exPlanations (SHAP) models

> Research article (Applied Intelligence, 2023) · cited 10× · AI/ML

**Wikidata**: [openalex:W4389486197](https://www.wikidata.org/wiki/openalex:W4389486197)  
**Source**: https://4ort.xyz/entity/explainable-prediction-of-deposited-film-thickness-in-ic-fabrication-with-catboost-and-shapley-additive-explanations-sha