# Experimental Study of Numerical Optimization for 3-D Microstructuring Using DMD-Based Grayscale Lithography

> Research article (Journal of Microelectromechanical Systems, 2015) · cited 29× · AI/ML

**Wikidata**: [openalex:W2172838120](https://www.wikidata.org/wiki/openalex:W2172838120)  
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