# Evaluation System and Correlation Analysis for Determining the Performance of a Semiconductor Manufacturing System

> Research article (Complex System Modeling and Simulation, 2021) · cited 14× · AI/ML

**Wikidata**: [openalex:W3214401306](https://www.wikidata.org/wiki/openalex:W3214401306)  
**Source**: https://4ort.xyz/entity/evaluation-system-and-correlation-analysis-for-determining-the-performance-of-a-semiconductor-manufacturing-system