# Evaluation of the effect of data quality on the profile uncertainty of critical dimension small angle x-ray scattering

> Research article (Journal of Micro/Nanolithography MEMS and MOEMS, 2016) · cited 25× · AI/ML

**Wikidata**: [openalex:W2227578263](https://www.wikidata.org/wiki/openalex:W2227578263)  
**Source**: https://4ort.xyz/entity/evaluation-of-the-effect-of-data-quality-on-the-profile-uncertainty-of-critical-dimension-small-angle-x-ray-scattering